Structure and thermal stability of arc evaporated (Ti 0.33 Al 0.67 ) 1 − x Si x N thin films [Elektronisk resurs]
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Flink, Axel, 1979- (författare)
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Andersson, J.M. (författare)
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Alling, Björn (författare)
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Daniel, R. (författare)
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Sjölén, J. (författare)
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Karlsson, L. (författare)
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Hultman, Lars (författare)
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Linköpings universitet Tekniska högskolan (utgivare)
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Linköpings universitet Institutionen för fysik, kemi och biologi (utgivare)
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Linköpings universitet Institutionen för fysik, kemi och biologi (utgivare)
- Publicerad: 2008
- Engelska.
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Ingår i: Thin Solid Films. - 0040-6090. ; 517:2, 714-721
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Sammanfattning
Ämnesord
Stäng
- (Ti 0.33 Al 0.67 ) 1 − x Si x N (0 ≤ x ≤ 0.29) thin solid films were deposited onto cemented carbide substrates by arc evaporation and analyzed using analytical electron microscopy, X-ray diffraction, nanoindentation, and density functional theory. As-deposited films with x ≤ 0.02 consisted mainly of a metastable c-(Ti,Al)N solid solution for which Si serves as a veritable grain refiner. Additional Si promoted growth of a hexagonal wurtzite (Al,Ti,Si)N solid solution, which dominated at 0.02 < x < 0.17. For x ≥ 0.17, the films were X-ray amorphous. Despite these widely different microstructures, all as-deposited films had nanoindentation hardness in the narrow range of 22–25 GPa. Isothermal annealing of the x = 0.01 alloy film at a temperature of 900 °C, corresponding to that in turning operation, resulted in spinodal decomposition into c-AlN and TiN and precipitation of h-AlN. For x = 0.09 films, annealing between 600 °C and 1000 °C yielded c-TiN precipitation from the h-(Al,Ti,Si)N phase. Furthermore, the x = 0.01 and x = 0.09 films exhibited substantial age hardening at 900 °C, to 34 GPa and 29 GPa due to spinodal decomposition and c-TiN precipitation, respectively. Films with a majority of c-(Ti,Al)N phase worked best in steel turning tests, while films with x > 0.02 developed cracks during such operation. We propose that the cracks are due to tensile strain which is caused by a decrease in molar volume during the phase transformation from hexagonal wurtzite (Al,Ti,Si)N into cubic TiN phase, which results in degradation in machining performance.
Ämnesord
- Natural Sciences (ssif)
- Naturvetenskap (ssif)
- NATURAL SCIENCES (svep)
- NATURVETENSKAP (svep)
Indexterm och SAB-rubrik
- TiAlSiN
- Hardness
- Phase transitions
- Analytical transmission electron microscopy
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Thin Solid Films